Methods of Measurement for Semiconductor Materials, Process Control, and Devices.

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Abstract:

The report describes NBS activities directed toward the development of methods of measurement for semiconductor materials, process control, and devices. Principal emphasis is placed on measurement of resistivity, carrier lifetime, and electrical inhomogeneities in semiconductor crystals evaluation of wire bonds, metallization adhesion, and die attachment and measurement of thermal properties of semiconductor devices and electrical properties of microwave devices. Work on related projects on silicon nuclear radiation detectors and specification of germanium for gamma-ray detectors is also described. Supplementary data concerning staff, standards committee activities, technical services, and publications are included as appendixes. Author

Author(s):
Bullis, W. Murray ; Baroody, A. J., Jr
Author Organization(s):
NATIONAL BUREAU OF STANDARDS WASHINGTON D C ELECTRONIC TECHNOLOGY DIV
Descriptive Note:
Quarterly progress rept. no. 7, 1 Jan-31 Mar 70,
Supplementary Note:
Previously announced as PB-194 961. See also Quarterly rept. dated May 70, AD-710 906.
Pagination:
0068

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
NBS-TN-555
Monitor Series:
TN-555
 Subject Terms
Joint Capability Areas:
JCA_3.2_Engagement; JCA_3_Force Application
Communities of Interest:
Advanced Electronics
Descriptor(s):
(*SEMICONDUCTORS, ELECTRICAL PROPERTIES), (*SEMICONDUCTOR DEVICES, QUALITY CONTROL), CARRIERS(SEMICONDUCTORS), ELECTRICAL RESISTANCE, THERMAL PROPERTIES, ELECTRIC TERMINALS, PHOTOELECTRIC EFFECT, INTEGRATED CIRCUITS, GAMMA COUNTERS, GERMANIUM, SILICON, MICROWAVE EQUIPMENT, TEST METHODS, RELIABILITY(ELECTRONICS)
Field(s)/Group(s):
Electrical and Electronic Equipment, Fabrication Metallurgy, Test Facilities, Equipment and Methods, Nuclear Instrumentation, Solid State Physics
Keyword(s):
CARRIER LIFETIME, PROCESS CONTROL
Report Date:
1970 Sep 01