SURVEY OF GLASS MATERIALS IN MICRO ELECTRONICS,

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Abstract:

The purpose of this survey is to review the glass materials available for use in the field of micro-circuit production, to review current literature as an indication of future potential and to suggest where further studies are to be recommended. Author

Author(s):
Cox, S. M.
Author Organization(s):
MINISTRY OF TECHNOLOGY LONDON (ENGLAND) MATERIALS DIV
Pagination:
0044

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
D. Mat.154
 Subject Terms
Communities of Interest:
No COI(s) Identified
Descriptor(s):
*GLASS, *MICROELECTRONICS, THERMAL PROPERTIES, SEMICONDUCTORS, FILMS, COMPOSITE MATERIALS, GLASS TEXTILES, UNITED KINGDOM
Field(s)/Group(s):
Ceramics, Refractories and Glass
Report Date:
1968 Sep 01