MINIATURE SEMICONDUCTOR PRESSURE SENSOR,

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Abstract:

It is concluded that the application of strain-gauge elements made from dendritic germanium foil for miniature pressure sensors is very promising because these strain-gauge elements can be made minimally small, for example, 1.5 - 2 mm long, 0.2 - 0.3 mm wide and 0.15 - 0.2 mm thick, and even smaller. Author

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