CORBINO-PME EFFECT AS A POSSIBLE TOOL FOR MICROELECTRONIC MATERIALS EVALUATION: THEORY.
Abstract:
A method for contactless determination of semiconductor parameters, such as minority carrier mobility or surface recombination velocity, has been theoretically explored and appears to be applicable for the evaluation of very thin and fragile materials as well as small size chips used in microelectronic technology. The effect investigated consists of focusing a sharp light beam on a piece of semiconductor material which is suspended in a magnetic field and measuring the torque caused by the circular flow of photoelectrons. This is called the Corbino-PME photomagnetoelectric effect, analogous to the Corbino -Hall and Corbino-Nernst effects, and the general diffusion equations that govern the case have been solved for special boundary conditions. A graphic presentation of the results is presented for various light spot diameters and surface recombination velocities, and numerical examples are discussed. Author