MICROELECTRONIC ENGINEERING. VOLUME I. FABRICATION TECHNOLOGY,

This text will prepare the designer to design systems which can be fabricated using the presently available technology, and to follow the technical literature and thus keep abreast of the art as it develops. The first chapter places in perspective the field of Microelectronics and presents a highly simplified picture of the Microelectronics fabrication processes. This brief description will establish a framework for understanding the detailed material to be presented. The rest of the material is divided into a series of chapters on 1 Solid state theory, designed to provide an adequate understanding of the behaviour of the devices used 2 Fabrication technology of both the thin film and semiconductor microelectronic circuits.