EXPERIMENTAL INVESTIGATION OF LITHIUM-ARGON SPUTTERING,

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Abstract:

The angular distribution of the sputtered lithium atoms under bombardment by positive argon ions was investigated. Argon ions were created by an arc discharge and electrostatically accelerated and focused on the target surface. The object of this investigation was to produce a sufficient amount of experimental data to substantiate or modify the already existing theories of angular distribution of the sputtered atoms at the oblique incidence of a low energy ion beam. The results indicate that at low ion energies and oblique angles of incidence the angular distribution is predominantly in the forward hemisphere relative to incident beam direction, and depends on the angle of ion incidence. The maximum forward sputtering current occurs at approximately 90 degrees to the beam direction. At low angles of incidence, i.e., below 30 degress, back-sputtering is possible. There is approximately a 40 degree relationship between the maximum back-sputtering current and the angle of ion incidence. Author

Author(s):
Malakhof, V. ; Stein, R. P. ; Smith, H. P., Jr.
Author Organization(s):
CALIFORNIA UNIV BERKELEY INST OF ENGINEERING RESEARCH
Supplementary Note:
Master's thesis.
Annotation:
Experimental investigation of lithium-argon sputtering.
Pagination:
0047

Security Markings

DOCUMENT & CONTEXTUAL SUMMARY

Distribution:
Approved For Public Release

RECORD

Collection: TR
Identifying Numbers
Report Number(s):
AS63 7
Contract/Grant Number(s):
Nonr22245
 Subject Terms
Communities of Interest:
No COI(s) Identified
Descriptor(s):
(*ION BEAMS, ARGON), (*LITHIUM, ION BOMBARDMENT), PARTICLE BEAMS, PARTICLE ACCELERATOR TECHNIQUES, SCATTERING, IMPURITIES, DISTRIBUTION
Keyword(s):
ANGLES, DISTRIBUTION
Report Date:
1963 Nov 25