LOW-COST MICROCIRCUITS.

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Abstract:

Research on thin-film, low-cost resistor elements was initiated. Multi-layered films were deposited by vacuum and electroless deposition techniques on ceramic substrates to form microcircuit boards. The multi-layered films were reduced to resistor elements by subtractive methods, utilizing xerographic methods in the stencilingetching procedure. After fixtures were developed to handle the micro-module wafers, resistors were fabricated and initial resistor data taken. Author

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