LOW-COST MICROCIRCUITS.
Abstract:
Research on thin-film, low-cost resistor elements was initiated. Multi-layered films were deposited by vacuum and electroless deposition techniques on ceramic substrates to form microcircuit boards. The multi-layered films were reduced to resistor elements by subtractive methods, utilizing xerographic methods in the stencilingetching procedure. After fixtures were developed to handle the micro-module wafers, resistors were fabricated and initial resistor data taken. Author
Security Markings
DOCUMENT & CONTEXTUAL SUMMARY
Distribution:
Approved For Public Release
RECORD
Collection: TR