COMPATIBLE TECHNIQUES FOR INTEGRATED CIRCUITRY
Abstract:
Most of the effort to date has been spent in developing process techniques which are necessary for integrated circuit fabrication. This effort has been both in morphological areas and thin films as applied to semiconducting substrate. Further efforts in perfecting our epitaxial techniques are reported. A program has been started to develop and fabricate typical circuits which are practical for a wide range of high and low frequency amplifier applications as well as logic circuits.
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