MICROELECTRONIC CIRCUITRY IN MICRO-MODULES
Abstract:
The microminiaturization of a Signal Corps air encoder subassembly is described. The subassembly is a shift register consisting of 28 flip-flops, 1 gate, and 3 driver circuits. These circuits are to be vacuum deposited on .310 inch square glass substrates and then stacked into micro-modules .625 inches in height. The techniques involved in monitoring the vacuum deposition of all films are discussed. Also discussed is a multiprobe jig which makes contact to 22 terminals of a deposited flip-flop and a mask changer which allows the changing of 4 masks without breading vacuum. Maximum accumulated mask registration tolerance is - .003 inches.
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Collection: TR