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Accession Number:
ADP007991
Title:
Electron-beam Writing System for Holographic Optical Elements,
Corporate Author:
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD MORIGUCHI OSAKA (JAPAN)
Report Date:
1992-07-01
Abstract:
A highly accurate and versatile electron-beamEB writing system suitable for fabrication of holographic optical elements HOEs with arbitrary patterns is developed. New HOEs with multiple functions are successfully fabricated by the EB system, and their unique applications are introduced.
Supplementary Note:
This article is from 'Advanced Processing and Characterization Technologies. Fabrication and Characterization of Semiconductor Optoelectronic Devices and Integrated Circuits Held in Clearwater, Florida on 8-10 May 1991. American Vacuum Society Series 10,' AD-A254 162, p108-111.
Pages:
0004
File Size:
0.00MB
