Accession Number:

ADP007934

Title:

Scanning Scattering Microscope: A Novel Optical Technique for Imaging Surface Microtopography,

Personal Author(s):

Corporate Author:

NATIONAL INST OF STANDARDS AND TECHNOLOGY GAITHERSBURG MD

Report Date:

1992-05-22

Abstract:

The Scanning Scattering Microscope SSM 1 can produce two-dimensional, high resolution micrographs of very small surface features and surface microtopography this optical technique is very sensitive to surface roughness, surface and near-surface damage, and individual surface defects. Its present lateral resolution of about 5 um is augmented by an extremely high sensitivity to surface roughness of about 2 nm.

Supplementary Note:

This article is from 'Organization of the Optical Society of America Photonic Science Topical Meeting Series. Volume 3. The Microphysics of Surfaces: Beam-Induced Processes. Held in Santa Fe, New Mexico on 11-13 Feb 1991,' AD-A254 135,p146-148.

Pages:

0003

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File Size:

0.00MB

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