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Accession Number:
ADP007925
Title:
Chemical Imaging of Surfaces using the Surface Analysis by Laser Ionization (SALI) Technique,
Corporate Author:
SRI INTERNATIONAL MENLO PARK CA
Report Date:
1992-05-22
Abstract:
The determination of the lateral distributions of chemical species on surfaces is of constantly increasing technological importance in many applications, such as integrated circuit manufacturing. The only two tools which have been available are scanning Auger electron spectroscopy AES and secondary ion mass spectrometry SIMS in scanning or microscope modes. The AES technique is the most widespread but generally is considered to be of lesser sensitivity than SIMS, at least for spatial resolutions defined by the primary beam diameter, d of approximately 0.1 um. Nominal sensitivities for AES are -2 to 3 concentrations for d 1 um, and 3 to 10 for d ranging from 1.0 am to 0.1 um, respectively. Also, scanning AES can be very problematic for insulators and electron sensitive materials, although it undoubtedly will continue to be a major tool.
Supplementary Note:
This article is from 'Organization of the Optical Society of America Photonic Science Topical Meeting Series. Volume 3. The Microphysics of Surfaces: Beam-Induced Processes. Held in Santa Fe, New Mexico on 11-13 Feb 1991.' AD-A254 135,p110-113.
Pages:
0004
File Size:
0.00MB
