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Accession Number:
ADP007913
Title:
UV Laser-Induced Interaction of C12 with GaAs 110,
Corporate Author:
COLUMBIA UNIV NEW YORK MICROELECTRONICS SCIENCE LAB
Report Date:
1992-05-22
Abstract:
We have studied the UV laser-induced interaction of molecular chlorine with a GaAs110 surface under ultra-high vacuum UHV conditions. Unlike previous studies of this system, we concentrated on well-defined surfaces, known coverages and low laser fluences. The experimental setup included a low energy electron diffraction apparatus, an Auger electron spectrometer and a differentially pumped mass spectrometer for thermal desorption spectra TDS and time-of-flight TOF measurements. Without illumination, chlorine was found to adsorb molecularly and dissociatively on n-GaAs110 surfaces at 85 K. The laser experiments were done with a 193- and 351-nm excimer laser, at fluences below 5 mJcm2. Illumination of a molecular chlorine-covered surface at 85 K with 193 nm excimer laser radiation led to the formation of AsCI3, which desorbed at 180 K. Illumination with 351-nm radiation resulted in the formation of smaller amounts of arsenic chloride on the surface.
Supplementary Note:
This article is from 'Organization of the Optical Society of America Photonic Science Topical Meeting Series. Volume 3. The Microphysics of Surfaces: Beam-Induced Processes. Held in Santa Fe, New Mexico on 11-13 Feb 1991,' AD-254-135, p58-61.
Pages:
0004
File Size:
0.00MB
