Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.
This article is from 'Ceramic Transactions. Volume 21. Proceedings of the Symposium on Microwave Theory and Application in Materials Processing Annual Meeting of the American Ceramic Society (23rd) Held in Cincinnati, Ohio on April 29 - May 3, 1991,' AD-A253 631, p403-410.