Accession Number:

ADP007257

Title:

National Institute of Standards and Technology Metrology for Soft-X-Ray Multilayer Optics,

Personal Author(s):

Corporate Author:

NATIONAL INST OF STANDARDS AND TECHNOLOGY GAITHERSBURG MD

Report Date:

1992-05-22

Abstract:

We describe the capabilities of the existing NIST soft X-ray reflectometry program and outline our proposed new characterization facility.

Supplementary Note:

This article is from 'OSA Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography Held in Monterey, California on 10-12 April 1991. Volume 12', AD-A252 998, p142-144.

Pages:

0003

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File Size:

0.00MB

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