TungstencarbonWC multilayers were prepared by ion beam sputtering. The properties of the multilayers were studied by low-angle x-ray diffraction, transmission electron microscopy TEM observation of the cross section and Auger electron spectroscopy. It was found that carbon atoms diffused into the tungsten layers and formed carbide. The measured reflectivity was in good agreement with the calculation, considering the decrease in density and the interfacial roughness. The multilayers were deposited on a concave spherical mirror and x-rays were focused by the mirror on a line-shaped image.
This article is from 'OSA Proceedings of the Topical Meeting on Soft-X-Ray Projection Lithography Held in Monterey, California on 10-12 April 1991. Volume 12', AD-A252 998, p101-105.