Accession Number:

ADP002600

Title:

Microstructure-Property Relations in Sputtered Films,

Personal Author(s):

Corporate Author:

PENNSYLVANIA STATE UNIV UNIVERSITY PARK MATERIALS RESEARCH LAB

Report Date:

1982-01-01

Abstract:

The mechanical and chemical properties of thin films depend at least in part on their microstructure. A structure zone model common to all vapor deposition methods has been developed to classify the various physical microstructures found.

Supplementary Note:

This article is from 'Proceedings of the DARPA (Defense Advanced Research Projects Agency) Workshop on Diamond-Like Carbon Coatings, held at Albuquerque, New Mexico on April 19-20, 1982,' AD-A136 766, p224-243.

Pages:

0019

Descriptors:

Identifiers:

File Size:

0.00MB

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