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Microstructure-Property Relations in Sputtered Films,
PENNSYLVANIA STATE UNIV UNIVERSITY PARK MATERIALS RESEARCH LAB
The mechanical and chemical properties of thin films depend at least in part on their microstructure. A structure zone model common to all vapor deposition methods has been developed to classify the various physical microstructures found.
This article is from 'Proceedings of the DARPA (Defense Advanced Research Projects Agency) Workshop on Diamond-Like Carbon Coatings, held at Albuquerque, New Mexico on April 19-20, 1982,' AD-A136 766, p224-243.