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Electrical and Optical Properties of 'Diamond-Like' Amorphous Carbon Films,
CITY COLL NEW YORK DEPT OF PHYSICS
The electrical and optical properties of diamond-like amorphous carbon films, prepared via the dc glow discharge decomposition of acetylene, show a remarkable dependence on preparation conditions. In particular, as a function of the substrate deposition temperature Td, the room temperature electrical conductivity of the films increases from 10 to the minus 16th power to 10 to the minus 6th powerohmcm and the optical energy gap decreases from 2.1 to 0.9eV as Td is increased from 25 to 375 C. The films would have essentially graphitic electrical and optical properties when deposited at Td or 400C. For possible semiconductor applications, we have shown that these diamond-like films can be doped n- or p-type via incorporation of P or B atoms during deposition. This doping effect has been confirmed via thermopower measurements. At present we are studying the thermal stability of these films. Results obtained from a study of the effects of annealing on the optical properties of these films will be presented.
This article is from 'Proceedings of the DARPA (Defense Advanced Research Projects Agency) Workshop on Diamond-Like Carbon Coatings, held at Albuquerque, New Mexico on April 19-20, 1982,' AD-A136 766, p139-151.