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Accession Number:
ADP002495
Title:
Analysis of Composite Resonator Geometries,
Corporate Author:
IOWA STATE UNIV AMES
Report Date:
1983-01-01
Abstract:
Composite resonators and other thin film piezoelectric acoustic devices are often composed of complex geometrical shapes which inturn may be made up of inhomogeneous material regions. Analytical solutions for the mode spectrum of such structures using perturbation theory or normal mode expansions must make approximations which may depart significantly from the real problem. Particularly, at microwave frequencies it may be inappropriate to neglect the finite thickness of the electrode metalization and treat it as an equivalent mass such as done for low frequency resonators. In composite resonators having p diffused silicon membranes the impurity diffusion profile and associated carrier distribution cause the material to be inhomogeneous.
Supplementary Note:
This article is from the Proceedings of the Annual Symposium on Frequency Control (37th), 1-3 Jun 83, Marriott Hotel, Philadelphia, Pennsylvania, AD-A136 673, p320-324.
Pages:
0005
File Size:
0.00MB
