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Chemically Polished High Frequency Resonators,
PIEZO CRYSTAL CO CARLISLE PA
The upper frequency limit of quartz resonators is determined by the physical properties of quartz and restrictions imposed by processing techniques. More often than not, the processing limitations are reached long before the physical limitations. Mechanical polishing has been used successfully for many years. The frequency limits determined by the mechanical polishing process have restricted the use of quartz resonators to frequencies less than 250 MHz. Chemical polishing is an etching process which removes the quartz from a blank in a well defined manner. The upper frequency limit of chemically polished resonators is much higher than mechanically polished resonators. Chemically polished SC resonators have surface topographies similar to highly polished resonators manufactured by conventional means. Currently, chemically polished SC resonators can operate up to the seventh overtone, higher overtones may be achievable when a better quality quartz is used as a source material. Frequencies in the GHz range are thus manufacturable using chemical polishing.
This article is from the Proceedings of the Annual Symposium on Frequency Control (37th), 1-3 Jun 83, Marriott Hotel, Philadelphia, Pennsylvania, AD-A136 673, p261-264.