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Accession Number:
ADA191240
Title:
Thin Film Research Diagnostics Instrumentation.
Corporate Author:
NEW MEXICO UNIV ALBUQUERQUE
Report Date:
1987-10-21
Abstract:
All equipment purchased under this contract has been used for deposition and analysis of thin films. In particular, the Ar-ion laser is being used to investigate film scatter at multiple wavelengths. The excimer laser is being used to enhance deposition mechanisms it illuminates a coated surface throughout film disposition. The microscope and ellipsometer are part of diagnostics used to analyze films.
Descriptive Note:
Final rept. 1 Jan 85-30 Jun 86,
Supplementary Note:
DOI: 10.21236/ADA191240
Pages:
0003
Contract Number:
AFOSR-85-0091
File Size:
0.20MB
