DID YOU KNOW? DTIC has over 3.5 million final reports on DoD funded research, development, test, and evaluation activities available to our registered users. Click
HERE to register or log in.
Accession Number:
ADA067183
Title:
Laser Assisted Semiconductor Device Processing
Corporate Author:
TRW DEFENSE SYSTEMS GROUP REDONDO BEACH CA
Report Date:
1979-01-30
Abstract:
The objective of this task is to evaluate and characterize laser induced processing of semiconductor materials and devices, with emphasis on the III-V compound series. Laser processing comprises three principal phenomena photon absorption, conversion of absorbed photon energy to heat, and material response to the thermal stimulus. We are examining each of these phenomena in detail both theoretically and experimentally. We have developed a model that includes, in addition to normal band-to-band absorption, absorption due to laser generated free carriers. The model assumes that the two effects are additive, and that the band-to-band absorption coefficient is constant and equal to its small signalvalue. We have found that, under these conditions, band-to-band absorption predominates when the laser wavelength is shorter than the bandgap wavelength. We regard the use of the small signal absorption coefficient, however, to be suspect, especially when the laser wavelength is close to the bandgap wavelength.
Descriptive Note:
Semi-annual technical rept. 1 Jun 1978-31 Jul 1979
Supplementary Note:
DOI: 10.21236/ADA067183
Pages:
0117
Distribution Statement:
Approved for public release; distribution is unlimited.
Contract Number:
MDA903-78-C-0284
Contract Number 2:
ARPA ORDER-3578
File Size:
35.57MB
