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Accession Number:
ADA056914
Title:
Computer Aided Engineering of Semiconductor Integrated Circuits
Corporate Author:
STANFORD UNIV CA INTEGRATED CIRCUITS LAB
Report Date:
1978-04-01
Abstract:
The objectives of this program are to remove the empiricism associated with the design and manufacturing of custom integrated circuits for military applications and to reduce the cost of these circuits by devising improved computer-aided engineering techniques. Efforts of research covered by this report are in the areas of 1 ion implantation and diffusion of dopants, 2 thermal oxidation, 3 chemical vapor deposition of silicon, and 4 device simulation and statistical circuit modeling.
Descriptive Note:
Interim rept. 1 Nov 1976-30 Apr 1977
Supplementary Note:
Sponsored in part by DARPA.
Pages:
0091
Distribution Statement:
Approved for public release; distribution is unlimited.
Contract Number:
DAAB07-77-C-2684
Contract Number 2:
ARPA ORDER-2985
File Size:
32.20MB
