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Accession Number:
AD0872313
Title:
Development of Thin-Film Active Devices on an Improved Insulating Substrate.
Corporate Author:
RCA LABS PRINCETON NJ
Report Date:
1970-07-01
Abstract:
The purpose of the program is to further improve the properties of silicon thin films epitaxially deposited on single crystal magnesium aluminate spinel to develop device processing techniques specific to the silicon-spinel system and to evaluate various device structures fabricated in the silicon-spinel composite. Author
Descriptive Note:
Final rept. 15 May 69-14 May 70,
Pages:
0125
Contract Number:
N00039-69-C-0549
File Size:
0.00MB
