DID YOU KNOW? DTIC has over 3.5 million final reports on DoD funded research, development, test, and evaluation activities available to our registered users. Click
HERE to register or log in.
Accession Number:
AD0860153
Title:
A Microcircuit Laboratory for the Underwater Electrical Engineering Department,
Corporate Author:
NAVAL ORDNANCE LAB WHITE OAK MD
Report Date:
1969-06-26
Abstract:
A clean room microelectronic laboratory has been completed in the Code 520, Underwater Electrical Engineering Department. This report describes the laboratory, the equipment and the capability. The laboratory is relatively small, occupying only 400 square feet of floor space, but is complete in that it is capable of performing most of the required techniques for fabricating microelectronic circuits with the major exception of diffusion. Author
Pages:
0018
File Size:
0.00MB
