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A Microcircuit Laboratory for the Underwater Electrical Engineering Department,
NAVAL ORDNANCE LAB WHITE OAK MD
A clean room microelectronic laboratory has been completed in the Code 520, Underwater Electrical Engineering Department. This report describes the laboratory, the equipment and the capability. The laboratory is relatively small, occupying only 400 square feet of floor space, but is complete in that it is capable of performing most of the required techniques for fabricating microelectronic circuits with the major exception of diffusion. Author