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THIN-FILM CIRCUITS PRODUCT IMPROVEMENT,
NAVAL AVIONICS FACILITY INDIANAPOLIS IN
The report covers the mechanical redesign and modifications which were accomplished on the NAFI in-line vacuum deposition machine during the up-dating program in order to insure greater reliability of operation. It also covers the steps taken to improve the processes attending the fabrication of thin-film circuitry on glass substrates in an effort to produce a more reliable product at an acceptable yield rate. Author
See also Rept. no. NAFI-TR-835, AD-640 933.