Accession Number:

AD0743658

Title:

Production of Epitaxial Single-Crystal Copper Films 5000 to 8000 Angstroms Thick and Accurate Determination of Their Orientation by Means of the Channeling Effect,

Personal Author(s):

Corporate Author:

FOREIGN TECHNOLOGY DIV WRIGHT-PATTERSON AFB OHIO

Report Date:

1972-04-04

Abstract:

The growth of epitaxial single crystal copper films 5000 to 8000 angstroms thick on a fresh rock salt clevage heated to 320C is described. Disposition took place in a given vacuum at a rate of 10 to 15 Asec. The resultant film being annealed at the same temperature for 1 hr. The orientation of the epitaxial film and the degree of perfection of its single crystal structure were studied by a method based on the channelling effect, using a 130 to 180 keV proton beam. Films deposited on the NaCl face had an accurate orientation throughout their whole thickness. Author

Supplementary Note:

Unedited rough draft trans. of Ukrayinskyi Fizychnyi Zhurnal (USSR) v15 n10 p1739-1740 1970.

Pages:

0008

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File Size:

0.00MB

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