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THE BERKELEY SCANNING ELECTRON MICROSCOPE-I.
CALIFORNIA UNIV BERKELEY ELECTRONICS RESEARCH LAB
This report describes the Berkeley Scanning Electron Microscope-I. The principles of operation of a scanning electron microscope and the design criteria for this particular microscope are stated in the introduction. The vacuum system, the electron-optics, the mechanical construction, and the circuits used in this instrument are described in subsequent sections. Author
Contract Number 2: