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Accession Number:
AD0481473
Title:
SOLID STATE BROADBAND OPTICAL DETECTOR.
Corporate Author:
TEXAS INSTRUMENTS INC DALLAS SEMICONDUCTOR-COMPONENTS DIV
Report Date:
1966-02-01
Abstract:
The development program for a sensitive broadband light demodulator is divided into two tasks Task 1, the development and fabrication of avalanche photodetectors Task 2, testing and characterization. This quarter efforts were concentrated on eliminating microplasmas. Three runs processed during this quarter show the last run had the correct impurity profile. This was the first run to use new photomasks including a P-ring to prevent inversion layers. Inversion layers were present on the surface but none at the photodiode. Microplasma studies were made by observing light emitted from a photodiode biased into avalanche also by chemically etching silicon material to bring out crystal defects. Three types of light emission were observed microplasmas, light emitted from blurred lines, and uniform breakdown. Little correlation was found between light emission and etching results. Low dislocation density material was more susceptible to processing damage for the current avalanche photodiode processing. Based on this, the last run was made with standard silicon material. Microplasmas were present but diodes were found that had photocurrent gains of 50 when biased below the first microplasma. Since all other design goals were met, these diodes will be used for microwave characterization. Author
Descriptive Note:
Quarterly rept. no. 3, 1 Nov 65-31 Jan 66,
Pages:
0028
Contract Number:
DA-28-043-AMC-00499(E)
File Size:
0.00MB
