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SEMICONDUCTOR THIN FILMS.
LEAR SIEGLER INC SANTA MONICA CALIF
1 To Deposit Films in a Dynamic 10 to the -8th power Vacuum System 2 To Investigate Annealing of GaAs Films 3 To Make Hall Measurements at a Series of Temperatures 4 To Investigate Deposition at Microns per Second 5 To Improve the Resolution in Electron Microscope Surface Studies and to Investigate a Setup for Etching Thicker Films Down to Thicknesses Suitable for Electron Microscopy and 6 To Continue Device Studies with Films of Available Quality. Author
Quarterly rept. no. 6, 1 Apr-30 June 63.
AF33 657 7623