Accession Number:

ADP013348

Title:

Characteristics Analysis of SAW Filter Using Al(0.36)Ga(0.64)N Thin Film

Descriptive Note:

Conference proceedings

Corporate Author:

KYUNGPOOK NATIONAL UNIV DAEGU (REPUBLIC OF KOREA) SCHOOL OF ELECTRONIC ENG AND COMPUTER SCIENCE

Report Date:

2003-04-03

Pagination or Media Count:

6.0

Abstract:

AlxGa1-xN sample with x0.36 was epitaxially grown on sapphire by MOCVD. SAW velocity of 5420 ms and TCF temperature coefficient of frequency of -51.20 ppmdeg C were measured from the SAW devices fabricated on the AlxGa1-xN sample, when kh value was 0.078, at temperatures between -30 deg C and 60 deg C. Electro-mechanical coupling coefficient was ranged from 1.26 to 2.22 . The fabricated SAW filter have shown a good device performance with insertion loss of -33.853 dB and side lobe attenuation of 20 dB.

Subject Categories:

  • Physical Chemistry
  • Line, Surface and Bulk Acoustic Wave Devices
  • Acoustics
  • Electricity and Magnetism

Distribution Statement:

APPROVED FOR PUBLIC RELEASE