Scanning Joule Expansion Microscopy as a Tool for Studying Local Heating Phenomena
KATHOLIEKE UNIV LEUVEN (BELGIUM)
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Scanning Joule expansion microscopy SJEM is a powerful technique enabling the generation of temperature maps of nanostructured samples. It operates by examining in detail the thermal expansion of a current-carrying structure with an atomic force microscope AFM. The thermal expansion varies proportional to the temperature making it possible to simultaneously gen- erate topographical maps as well as thermal maps of samples. The lateral resolution of the SJEM technique estimated to be 20 nm or better is considerably better than that of other comparable techniques e.g. scanning thermal microscopy with a typical resolution of 100 nm. Previously we implemented and optimized a SJEM in an existing AFM system 2. Using the SJEM technique it is possible to identify hot spots and to examine in detail the temperature profile in nanostructured materials. Here, we investigate the reliability of this technique for microelectronics related applications.
- Solid State Physics