Accession Number:

ADP013057

Title:

GaN Uniformity Control on Multiple 3 Inch Wafer Grown in Planetary Reactors

Descriptive Note:

Conference proceedings

Corporate Author:

AIXTRON AG AACHEN (GERMANY)

Report Date:

2000-06-23

Pagination or Media Count:

2.0

Abstract:

Subject Categories:

  • Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE