Accession Number:

ADP013034

Title:

Deformation and Viscouse Flow in Nano-Imprinting

Descriptive Note:

Conference proceedings

Corporate Author:

RUSSIAN ACADEMY OF SCIENCES CHERNOGOLOVKA (RUSSIA) INST OF MICROELECTRONICS TECHNOLOGY

Report Date:

2000-06-23

Pagination or Media Count:

4.0

Abstract:

The paper is concentrated on the theoretical consideration of imprinting process and of polymer flow during embossing of the master. Another activity was related to development of experimental techniques for performing imprinting.

Subject Categories:

  • Manufacturing and Industrial Engineering and Control of Production Systems
  • Electrical and Electronic Equipment

Distribution Statement:

APPROVED FOR PUBLIC RELEASE