Accession Number:

ADP012170

Title:

Preparation and Properties of Amorphous Carbon Oxynitrides a-CNxOy Films Made by a Nitrogen Radical Sputter Method and by the Layer-by-Layer Method

Descriptive Note:

Proceedings

Corporate Author:

GIFU NATIONAL COLL OF TECHNOLOGY (JAPAN) DEPT OF ELECTRICAL AND COMPUTER ENGINEERING

Report Date:

2001-04-01

Pagination or Media Count:

6.0

Abstract:

We have tried to prepare amorphous carbon oxynitrides a-CNxOy films by the oxygen radical treatment ORT of amorphous carbon nitrides a-CNx and also by the layer-by-layer method. Properties of a-CNxOy films were studied with x-ray photoelectron spectroscopy XPS, photothermal deflection spectroscopy PDS, ultraviolet-visible UV-VIS optical transmittance spectra Raman spectra and electron spin resonance ESR. Oxygen radical affects to a-CNx by etching, termination of defects and oxidation. A-CNxOy films are interesting for the application to luminescent materials and also to low dielectric constant materials.

Subject Categories:

  • Physical Chemistry
  • Solid State Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE