Preparation and Properties of Amorphous Carbon Oxynitrides a-CNxOy Films Made by a Nitrogen Radical Sputter Method and by the Layer-by-Layer Method
GIFU NATIONAL COLL OF TECHNOLOGY (JAPAN) DEPT OF ELECTRICAL AND COMPUTER ENGINEERING
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We have tried to prepare amorphous carbon oxynitrides a-CNxOy films by the oxygen radical treatment ORT of amorphous carbon nitrides a-CNx and also by the layer-by-layer method. Properties of a-CNxOy films were studied with x-ray photoelectron spectroscopy XPS, photothermal deflection spectroscopy PDS, ultraviolet-visible UV-VIS optical transmittance spectra Raman spectra and electron spin resonance ESR. Oxygen radical affects to a-CNx by etching, termination of defects and oxidation. A-CNxOy films are interesting for the application to luminescent materials and also to low dielectric constant materials.
- Physical Chemistry
- Solid State Physics