Semiconductor Surface Characterization by Scanning Probe Microscopies
CHEMNITZ UNIV OF TECHNOLOGY (GERMANY) INST OF PHYSICS
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Besides the well-known 3-dimensional surface topography, scanning probe methods give access to a whole world of local physical information on solid surfaces. Here, we demonstrate opportunities given by scanning tunnelling spectroscopy STS and scanning electrical force microscopyspectroscopy SEFMSEFS. In this paper, we compare the wide-spread UHV-STMSTS technique with ambient SEFMSEFS. After short description of the methods, some applications to semiconductor surfaces are discussed. Possibly SEFS has a great potential for local electronic spectroscopy in near future.
- Electrical and Electronic Equipment
- Atomic and Molecular Physics and Spectroscopy