Laser Micromachining of THz Components
ARIZONA UNIV TUCSON
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Laser micromachining techniques can be used to fabricate high-quality waveguide and quasi-optical components to micrometer accuracies. Successful GHz waveguide designs can be directly scaled to THz frequencies. We expect this promising technology to allow the construction of the first fully integrated THz heterodyne imaging arrays. At the University of Arizona, construction of the first laser micromachining system designed for THz waveguide components fabrication has been completed. Once we have tested and characterized our system we will use it to construct prototype THz 1x4 focal plane mixer arrays, AR coated silicon lenses, THz LO sources, phase gratings and more. The system can micromachine structures down to a few microns accuracy and up to 6 inches across in a short time. This paper discusses the design and performance of our laser micromachining system, and illustrates the type and range of components this exciting new technology will make accessible to the THz community.
- Lasers and Masers