Accession Number:
ADP011763
Title:
Micromachining and Integration of Terahertz Components
Descriptive Note:
Corporate Author:
VIRGINIA UNIV CHARLOTTESVILLE SEMICONDUCTOR DEVICE LAB
Personal Author(s):
Report Date:
2000-09-29
Pagination or Media Count:
3.0
Abstract:
Two recent innovations at the University of Virginia have the potential to significantly reduce the cost of terahertz mixers and multipliers. These are the integration of high-quality and low-parasitic GaAs diodes on dielectric substrates and the fabrication of terahertz waveguide circuits by micromachining. This paper reviews the basic fabrication processes and presents the most recent results.
Descriptors:
Subject Categories:
- Electrical and Electronic Equipment
- Optics