Accession Number:

ADP011763

Title:

Micromachining and Integration of Terahertz Components

Descriptive Note:

Corporate Author:

VIRGINIA UNIV CHARLOTTESVILLE SEMICONDUCTOR DEVICE LAB

Personal Author(s):

Report Date:

2000-09-29

Pagination or Media Count:

3.0

Abstract:

Two recent innovations at the University of Virginia have the potential to significantly reduce the cost of terahertz mixers and multipliers. These are the integration of high-quality and low-parasitic GaAs diodes on dielectric substrates and the fabrication of terahertz waveguide circuits by micromachining. This paper reviews the basic fabrication processes and presents the most recent results.

Subject Categories:

  • Electrical and Electronic Equipment
  • Optics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE