Study of 5-Mask TFT Array Process With Low Cost, High Yield and High Performance Characteristics
ELECTRONIC RESEARCH AND SERVICE ORGANIZATION/INDUSTRIAL TECHNOLOGY RESEARCH INST HSINCHU (TAIWAN)
Pagination or Media Count:
Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.
- Electrical and Electronic Equipment
- Manufacturing and Industrial Engineering and Control of Production Systems