Accession Number:

ADP011321

Title:

Study of 5-Mask TFT Array Process With Low Cost, High Yield and High Performance Characteristics

Descriptive Note:

Corporate Author:

ELECTRONIC RESEARCH AND SERVICE ORGANIZATION/INDUSTRIAL TECHNOLOGY RESEARCH INST HSINCHU (TAIWAN)

Report Date:

2000-07-01

Pagination or Media Count:

7.0

Abstract:

Three types of 5-mask TFT array process have been compared and analyzed their characteristics including TFT performance process window, etc. Results showing here indicate that a 5-mask TFT manufacturing process can be optimized with low cost high production yield and high performance. These properties let the reduced mask TFT array process reveal a much higher potential in mass production.

Subject Categories:

  • Electrical and Electronic Equipment
  • Manufacturing and Industrial Engineering and Control of Production Systems

Distribution Statement:

APPROVED FOR PUBLIC RELEASE