Accession Number:

ADP011030

Title:

Generalized Ellipsometry Using a Rotating Sample

Descriptive Note:

Corporate Author:

HOUSTON UNIV TX DEPT OF PHYSICS

Personal Author(s):

• Xu, Weiliang
• Wood, Lowell T.
• Golding, Terry D.

Report Date:

2001-01-01

Pagination or Media Count:

6.0

Abstract:

We proposed a generalized ellipsometric technique using a rotating sample. The ellipsometer consists of a polarizer, a rotatable sample holder, an analyzer, and a detector. Fourier coefficients are measured and used to extract the systems dielectric tensors and film thicknesses. The main advantage of the technique is that all parts of the ellipsometer are fixed except the sample, whose azimuth angle can be modulated. We show calculated responses to isotropic and anisotropic materials as well as superlattices. Potential applications for characterizations of anisotropic nanostructures are discussed.

Descriptors:

• *ANISOTROPY
• *ELLIPSOMETERS
• SYNTHESIS(CHEMISTRY)
• SUPERLATTICES
• DIELECTRICS
• TENSORS
• FOURIER SERIES
• NANOSTRUCTURES

Subject Categories:

• Numerical Mathematics
• Test Facilities, Equipment and Methods
• Crystallography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE