Accession Number:

ADP007991

Title:

Electron-beam Writing System for Holographic Optical Elements,

Descriptive Note:

Corporate Author:

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD MORIGUCHI OSAKA (JAPAN)

Personal Author(s):

• Hori, Yoshikazu
• Sogawa, Fumihiro
• Kato, Makoto

Report Date:

1992-07-01

Pagination or Media Count:

4.0

Abstract:

A highly accurate and versatile electron-beamEB writing system suitable for fabrication of holographic optical elements HOEs with arbitrary patterns is developed. New HOEs with multiple functions are successfully fabricated by the EB system, and their unique applications are introduced.

Descriptors:

• *ELECTRON BEAMS
• *FABRICATION
• *HOLOGRAMS
• FUNCTIONS
• PATTERNS
• WRITING
• JAPAN

Subject Categories:

• Manufacturing and Industrial Engineering and Control of Production Systems
• Holography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE