Electron-beam Writing System for Holographic Optical Elements,
MATSUSHITA ELECTRIC INDUSTRIAL CO LTD MORIGUCHI OSAKA (JAPAN)
Pagination or Media Count:
A highly accurate and versatile electron-beamEB writing system suitable for fabrication of holographic optical elements HOEs with arbitrary patterns is developed. New HOEs with multiple functions are successfully fabricated by the EB system, and their unique applications are introduced.
- Manufacturing and Industrial Engineering and Control of Production Systems