Characterization of Silicon Nitride Synthesized By Microwave Heating,
OAK RIDGE NATIONAL LAB TN
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Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.
- Ceramics, Refractories and Glass
- Radiofrequency Wave Propagation