Accession Number:

ADP007753

Title:

Characterization of Silicon Nitride Synthesized By Microwave Heating,

Descriptive Note:

Corporate Author:

OAK RIDGE NATIONAL LAB TN

Report Date:

1992-04-27

Pagination or Media Count:

8.0

Abstract:

Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.

Subject Categories:

  • Ceramics, Refractories and Glass
  • Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE