Accession Number:

ADP007753

Title:

Characterization of Silicon Nitride Synthesized By Microwave Heating,

Descriptive Note:

Corporate Author:

OAK RIDGE NATIONAL LAB TN

Personal Author(s):

• Kiggans, J. O.
• Hubbard, C. R.
• Steele, R. R.
• Kimrey, H. D.

Report Date:

1992-04-27

Pagination or Media Count:

8.0

Abstract:

Recently, a new procedure was developed for the nitridation of high purity silicon via microwave heating. Silicon samples were processed to various stages of nitridation utilizing microwave heating and then analyzed by X-ray diffraction and by scanning electron microscopy. These data were compared to that obtained from samples nitrided by conventional heating methods.

Descriptors:

• *MICROWAVES
• *CERAMIC MATERIALS
• *SILICON NITRIDES
• *FIRING(CERAMICS)
• DIFFRACTION
• ELECTRON MICROSCOPY
• ELECTRONS
• HEATING
• MICROSCOPY
• PURITY
• SCANNING
• SILICON
• X RAY DIFFRACTION
• X RAYS
• HEATING
• HIGH TEMPERATURE
• SYMPOSIA

Subject Categories:

• Ceramics, Refractories and Glass
• Radiofrequency Wave Propagation

Distribution Statement:

APPROVED FOR PUBLIC RELEASE