Accession Number:

ADP007661

Title:

Propagation of 100-GHz Bandwidth Electrical Pulses on a Silicon-Based Microstrip Line with Buried CoSi sub 2 Groundplane,

Descriptive Note:

Corporate Author:

AT AND T BELL LABS HOLMDEL NJ

Personal Author(s):

• Roskos, Hartmut
• Nuss, Martin C.
• Goossen, Keith W.
• Kisker, David W.
• Tell, Ben

Report Date:

1992-05-22

Pagination or Media Count:

6.0

Abstract:

We present a microstrip line that uses a highly conducting cobalt silicide layer buried 7 micron below the surface of single-crystalline silicon as groundplane. This novel transmission line shows significantly reduced dispersion for electrical pulses of 100 GHz bandwidth compared to a conventional microstrip line with the groundplane on the back of the substrate. The 2.5 ps risetime 10-90 of electrical pulses propagating on the line increases to only 3.7 ps after a distance of 5 mm compared to an increase from 2.7 ps to 11.3 ps on a conventional microstrip line.

Descriptors:

• *TRANSMISSION LINES
• *OPTICAL CIRCUITS
• *ELECTROOPTICS
• BANDWIDTH
• COBALT
• DISPERSIONS
• LAYERS
• PULSES
• SILICIDES
• SILICON
• SUBSTRATES
• SURFACES
• INTEGRATED CIRCUITS
• ALUMINUM
• PHOTOCONDUCTIVITY
• SYMPOSIA
• COBALT ALLOYS

Subject Categories:

• Electrical and Electronic Equipment
• Electrooptical and Optoelectronic Devices

Distribution Statement:

APPROVED FOR PUBLIC RELEASE