Accession Number:

ADP007256

Title:

Nonspecular Scattering from X-Ray Multilayer Structures,

Descriptive Note:

Corporate Author:

CALIFORNIA UNIV BERKELEY LAWRENCE BERKELEY LAB

Personal Author(s):

• Kortright, J. B.

Report Date:

1992-05-22

Pagination or Media Count:

5.0

Abstract:

Measurements of non-specular x-ray scattering from a WC multilayer structure are presented which demonstrate that in-plane heterogeneities exist in high quality multilayer structures on high quality substrates. Certain features of the non-specular scattering are presented and discussed. The implications of these observations for soft x-ray imaging using multilayer-coated focussing mirrors are discussed.

Descriptors:

• *LITHOGRAPHY
• MEASUREMENT
• MIRRORS
• QUALITY
• SCATTERING
• SOFT X RAYS
• STRUCTURES
• SUBSTRATES
• X RAY SCATTERING
• X RAYS

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE