Nonspecular Scattering from X-Ray Multilayer Structures,
CALIFORNIA UNIV BERKELEY LAWRENCE BERKELEY LAB
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Measurements of non-specular x-ray scattering from a WC multilayer structure are presented which demonstrate that in-plane heterogeneities exist in high quality multilayer structures on high quality substrates. Certain features of the non-specular scattering are presented and discussed. The implications of these observations for soft x-ray imaging using multilayer-coated focussing mirrors are discussed.