Accession Number:

ADP007249

Title:

Tungsten/Carbon Multilayers Prepared by Ion-Beam Sputtering,

Descriptive Note:

Corporate Author:

NIKON CORP TOKYO (JAPAN)

Personal Author(s):

• Murakami, Katsuhiko
• Nakamura, Hiroshi
• Oshino, Tetsuya
• Nikaido, Hideo

Report Date:

1992-05-22

Pagination or Media Count:

5.0

Abstract:

TungstencarbonWC multilayers were prepared by ion beam sputtering. The properties of the multilayers were studied by low-angle x-ray diffraction, transmission electron microscopy TEM observation of the cross section and Auger electron spectroscopy. It was found that carbon atoms diffused into the tungsten layers and formed carbide. The measured reflectivity was in good agreement with the calculation, considering the decrease in density and the interfacial roughness. The multilayers were deposited on a concave spherical mirror and x-rays were focused by the mirror on a line-shaped image.

Descriptors:

• *LITHOGRAPHY
• AGREEMENTS
• ANGLES
• ATOMS
• AUGER ELECTRON SPECTROSCOPY
• AUGER ELECTRONS
• AUGERS
• CARBIDES
• CARBON
• CROSS SECTIONS
• DENSITY
• DIFFRACTION
• ELECTRON MICROSCOPY
• ELECTRON SPECTROSCOPY
• ELECTRONS
• IMAGES
• ION BEAMS
• IONS
• LAYERS
• LOW ANGLES
• MICROSCOPY
• MIRRORS
• OBSERVATION
• REFLECTIVITY
• ROUGHNESS
• SPECTROSCOPY
• SPUTTERING
• TUNGSTEN
• X RAYS

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE