Accession Number:

ADP007248

Title:

Achieving Uniform Multilayer Coatings on Figured Optics,

Descriptive Note:

Corporate Author:

AT AND T BELL LABS MURRAY HILL NJ

Personal Author(s):

• Waskiewicz, W. K.
• Windt, D. L.
• Bjorkholm, J. E.
• Eichner, L.
• Freeman, R. R

Report Date:

1992-05-22

Pagination or Media Count:

4.0

Abstract:

We discuss design considerations for high-reflectance multilayer coatings for use in soft X-ray projection lithography optical systems. Techniques used to control and characterize coating uniformity on figured optics are described. Recent results are presented.

Descriptors:

• *LITHOGRAPHY
• *OPTICS
• COATINGS
• CONTROL
• REFLECTANCE
• SOFT X RAYS
• X RAYS

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE