Accession Number:

ADP007242

Title:

X-Ray Production Efficiency at 130 A from Laser-Produced Plasmas,

Descriptive Note:

Corporate Author:

LAWRENCE LIVERMORE NATIONAL LAB CA

Personal Author(s):

• Kauffman, Robert L.
• Phillion, Donald W.

Report Date:

1992-05-22

Pagination or Media Count:

4.0

Abstract:

X-ray production at 130 A is measured from laser-produced plasmas using sub-Joule energies. Dependence of efficiency on target material and intensity are presented. Projection x-ray lithography systems require high brightness, narrow band sources in the soft x-ray region. Source requirements are set by the multilayer x-ray imaging optics and these typically have a bandpass of a few per cent below 200 eV. We have begun investigating laser-produced plasmas as a potential x-ray source for projection lithography. Although these are typically broadband sources they can be efficient radiators in the sub-kilovolt region. By proper choice of laser wavelength, pulse length, irradiation intensity, and target material, emission in the bandpass of interest can be optimized.

Descriptors:

• *LITHOGRAPHY
• *SOFT X RAYS
• BRIGHTNESS
• BROADBAND
• EFFICIENCY
• EMISSION
• INTENSITY
• IRRADIATION
• LASERS
• LENGTH
• MATERIALS
• OPTICS
• PRODUCTION
• PULSES
• REGIONS
• REQUIREMENTS
• SELECTION
• TARGETS
• X RAYS

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE