Accession Number:

ADP007239

Title:

Soft-X-Ray Projection Imaging Using a Laser Plasma Source,

Descriptive Note:

Corporate Author:

SANDIA NATIONAL LABS ALBUQUERQUE NM

Personal Author(s):

• Tichenor, D. A.
• Kubiak, G. D.
• Malinowski, M. E.
• Stulen, R. H.
• Haney, S. J.

Report Date:

1992-05-22

Pagination or Media Count:

4.0

Abstract:

The feasibility of producing small feature sizes in resists using soft x-ray projection lithography has been demonstrated. Experiments by AT and T Bell Laboratories have achieved features small as 0.05 microns using a Schwarzschild objective and 140 angstrom radiation from an undulator at the National Synchrotron Light Source. We describe here a similar imaging system in which the illumination is derived from a high-fluence laser plasma source LPS of soft x-rays instead of a synchrotron radiation source. The laser plasma source has been shown to be a useful illumination source for soft x-ray microscopy.

Descriptors:

• *LITHOGRAPHY
• X RAYS
• IMAGE PROJECTORS
• OPTICAL IMAGES

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE