Accession Number:

ADP007227

Title:

Soft-X-Ray Projection Lithography System Design,

Descriptive Note:

Corporate Author:

LAWRENCE LIVERMORE NATIONAL LAB CA

Personal Author(s):

• Ceglio, N. M.
• Hawryluk, A. M.

Report Date:

1992-05-22

Pagination or Media Count:

6.0

Abstract:

A baseline design for a Soft X-Ray Projection Lithography SXPL system is presented. This design is intended to serve as a starting point, and provide an overview of the likely form and structure of a SXPL prototype. Technical performance specifications for system components are presented along with analyses supporting the specification choices.

Descriptors:

• *LITHOGRAPHY
• SHORT WAVELENGTHS
• SOFT X RAYS
• PROTOTYPES

Subject Categories:

• Photography

Distribution Statement:

APPROVED FOR PUBLIC RELEASE