High Performance Multilayer X-Ray Optics,
LAWRENCE LIVERMORE NATIONAL LAB CA
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We review the state-of-the-art in multilayer ML coatings for high normal incidence reflectivity at soft x-ray wavelengths. In particular, molybdenum-silicon ML and RU-boron carbide ML grown by magnetron sputtering have demonstrated normal incidence reflectivities as high as 64 at 130 A and 20 at 70 A respectively. A strong dependence of the Mo-Si layer morphology on the sputtering gas pressure is observed, and is directly correlated with the normal incidence x-ray reflectivity. We consider issues relevant to the deposition of multilayers on figured imaging optics, and describe recent measurements of the normal incidence reflectivity of spherical substrates coated with Mo-Si ML.
- Coatings, Colorants and Finishes
- Nuclear Physics and Elementary Particle Physics