Accession Number:

ADP007068

Title:

High Performance Multilayer X-Ray Optics,

Descriptive Note:

Corporate Author:

LAWRENCE LIVERMORE NATIONAL LAB CA

Personal Author(s):

• Stearns, D. G.
• Rosen, R. S.
• Vernon, S. P.

Report Date:

1992-05-22

Pagination or Media Count:

8.0

Abstract:

We review the state-of-the-art in multilayer ML coatings for high normal incidence reflectivity at soft x-ray wavelengths. In particular, molybdenum-silicon ML and RU-boron carbide ML grown by magnetron sputtering have demonstrated normal incidence reflectivities as high as 64 at 130 A and 20 at 70 A respectively. A strong dependence of the Mo-Si layer morphology on the sputtering gas pressure is observed, and is directly correlated with the normal incidence x-ray reflectivity. We consider issues relevant to the deposition of multilayers on figured imaging optics, and describe recent measurements of the normal incidence reflectivity of spherical substrates coated with Mo-Si ML.

Descriptors:

• *OPTICAL COATINGS
• *SOFT X RAYS
• *COHERENT OPTICAL RADIATION
• *REFLECTIVITY
• SHORT WAVELENGTHS
• BORON CARBIDES
• COHERENT RADIATION
• SPUTTERING
• OPTICAL IMAGES
• SYMPOSIA

Subject Categories:

• Coatings, Colorants and Finishes
• Optics
• Nuclear Physics and Elementary Particle Physics

Distribution Statement:

APPROVED FOR PUBLIC RELEASE